Analytical study reveals that static magnetic fields improve electron density uniformity in capacitively coupled plasmas, suggesting better film growth consistency.
Key Points
Uniform application of static magnetic fields achieved a consistent electron density distribution.
Results highlight the role of magnetic fields in suppressing electric field effects, enhancing film growth.
Analytical study integrated with COMSOL simulations confirmed effective uniformization of the electron density.
Findings emphasize the importance of perpendicular magnetic fields for optimal performance in PE-CVD processes.