Microhotplate as a Platform for Calorimetry

Calorimetry is a powerful method for characterising materials. The heat of a reaction can be directly measured with good accuracy. The established method usually requires large amounts of materials, which is a major drawback when studying thin film reactions. A MEMS microhotplate-based microcalorimeter is developed in this study; it allows us to investigate thin film reactions by using a very small amount of materials. The temperature scale is calibrated by a well-known heat method of melting of two metal films. Energy calibration is also solved, and thus real information can be extracted for various solid-phase thin film reactions. In order to study reactions taking place close to room temperature, a cooled sample holder is developed, and the measurements can be started well below 0 °C.