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April 9, 2024Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaOpen Access

Effects of ion implantation with arsenic and boron in germanium-tin layers

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Authors

SASylvester AmoahUniversity of Arkansas at FayettevilleHSHryhorii StanchuUniversity of Arkansas at FayettevilleGAGrey AbernathyDartmouth College

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Amoah et al. (2024) studied this question.

synapsesocial.com/papers/68e6fcb5b6db643587676f4ahttps://doi.org/10.1116/6.0003565
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