NbN-based half-flux-quantum element for integration with superconducting qubits

Half-flux-quantum (HFQ) logic is a superconductor logic family comprising conventional Josephson junctions (0-JJs) and π Josephson junctions (π-JJs). The energy scale of HFQ logic can be flexibly reduced by phase shifts owing to π-JJs; thus, HFQ circuits are a promising building block for qubit interface circuits. In this study, we demonstrate an NbN-based HFQ circuit element compatible with NbN-based superconducting qubits for all-NbN monolithic integration of qubits and HFQ circuits. The use of NbN is beneficial for both qubits and HFQ circuits owing to its high-quality junctions and high kinetic inductance. First, we developed a prototype of an NbN-based 0-JJ/π-JJ hybrid fabrication process for designing HFQ circuits. We evaluated 0-JJs and π-JJs fabricated through the hybrid process, which demonstrated that the 0-JJs had a small deviation with regard to critical current density and the π-JJs had a sufficiently high critical current density to work as π phase shifters. Furthermore, we fabricated an HFQ superconducting quantum interference device, which is one of the most fundamental elements in HFQ circuits, and observed clear HFQ-period modulation in the magnetic flux dependence of the maximum current at 4.2 K.