Sintering BFO targets for RF sputtering

Ceramic BiF eO 3 samples were prepared by rapid sintering at 880 • C. Two compositions were examined.A 56/44 Bi 2 O 3 /F e 2 O 3 mole% composition and a 56Bi 2 O 3 • 44F e 2 O 3 + 6.5wt% N aCl composition.The samples were heat treated at different times up to 8 minutes and the phase content was examined as a function of the time using XRD measurements and analysis.It was demonstrated that using both compositions, maximum BiF eO 3 phase content is obtained after 3.5 minutes.In the former approximately 50% of the material transformed to BiF eO 3 while in the latter 98.5%.