Abstract The successful fabrication and operation of Microactuators and Micro Mechanical parts by IC-based micromachining technology gave us the opportunity in producing microelectromechanical systems (MEMS) 1. There is a significant difference between the mere miniaturization of macroscopic machines and the IC-based MEMS. MEMS have the following features in which much interest has been attracted: (1) Miniaturization: Structures of a few tens of microns with the accuracy of sub-microns can be fabricated. (2) Multiplicity: Many structures can be obtained simultaneously by pre-assembly and batch processes. (3) Microelectronics: The integration with electronic circuits and sensors is possible with the IC-compatible micromachining technology; the integration results in smart micro structures. This presentation reviews the recent progress of Microactuators and Micromotors fabricated by the micromachining process. A system architecture suitable for MEMS and applications of MEMS are also discussed. The actual movement of single or arrayed actuators will be shown by the video.
Hiroyuki Fujita (Sun,) studied this question.