The paper presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of 12 × 12 × 3.3 mm 3 . Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from 1 × 10 -4 Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.
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Zhao et al. (2024) studied this question.
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