Development of an Indirect Photoacoustic Sensor Concept for Highly Accurate Low-ppm Gas Detection

Indirect photoacoustic sensing (PAS) offers accurate low-ppm gas measurements, with an inverse relation of the obtained signal to the measured gas concentration. The gas is sealed in transistor outline (TO) housing using a new method. This provides a relatively a very small volume for the reference gas signal. The gas sensing system features a black body source, highly reflective measurement volumes and TO housing sealed with gas and multiple sensors. CO2 is used for testing and characterizing the sensor sealing and working concepts in the measurement range 0–2000 ppm, with other gases, such as CO, methane, etc., planned to be tested. A PAS signal corresponding to a 4 ppm minimum gas concentration is measured. Allan Deviation measurements provide a theoretical limit of detection of 3.14 ppm, with the integration time of 5.2 × 103 s.