Efficient Modeling of Piezoelectric Micromachined Ultrasonic Transducers Using a Combination of Finite and Lumped Element Modeling

This research paper presents a comprehensive methodology for the efficient modeling of piezoelectric micromachined ultrasonic transducers (PMUTs) using a combination of finite and lumped element models. A single membrane is first studied in air with an eigenfrequency study in order to calibrate the lumped element model on the finite element model. From this electrical equivalent circuit, a complete model of the PMUT cell composed of numerous membranes is developed using the propagation, directivity, absorption, mutual and self-impedances, and variability of the resonance frequencies due to manufacturing discrepancies. The calculated acoustic response of the PMUT is then compared with a measured response, in water. The relatively good agreement between the simulation and the measurement, as well as the very low computation time, makes this approach relevant for further optimization of the PMUT design to target larger bandwidth and higher sensitivity.