The responsivity and the bandwidth are both key parameters of a PD but also encounter tradeoff during the device designing due to the thickness of InGaAs layer absorbing light. In this paper, a balanced structure to achieve both high speed and relatively high responsivity is reported. A uni-traveling carrier PD(UTC-PD) structure is taking advantage of the high drift velocity to meet the rather high-speed exhibition. For responsivity enhancing, we apply back reflector beneath the top-illuminated UTC-PD based on micro transfer printing. To further increase the bandwidth of small size PD, we optimize the shape of CPW electrodes of PDs. With our final structure, the UTC-PD exhibits 3dB bandwidth of 100GHz and responsivity of 0.4A/W.
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Wang et al. (2024) studied this question.
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