We present a differential wireless passive sensor based on a miniature antenna associated with a MEMS capacitive pressure sensor. In this configuration, a change in the external pressure results in a shift of the antenna resonance frequency and, thus, a variation in the antenna Radar Cross Section (RCS) detectable from a distance of a few meters. The MEMS and the antenna are modelled and simulated, and a co-design procedure is developed to optimize their performance. The MEMS are fabricated on a 200-mm technological platform and characterized. A specific setup was conceived to characterize the antenna sensor as a function of pressure in an anechoic chamber.
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Alcesilas et al. (2024) studied this question.
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