Silicon nitride photonics: large scale integration and applications

Silicon nitride (SiN) have become an essential material for integrated photonics. It is needed whenever very low optical losses, high optical power, low thermal sensitivity or broad wavelength range is required. SiN waveguides therefore present a great interest for applications as diverse as quantum photonics, data-communication, neuromorphic computing, LiDAR, sensing and microwave optic. We present our latest results on two distinct platforms: An 8" LPCVD SiN platform featuring ultra-low loss (5dB/m) and a 12" Physical Vapor Deposition (PVD) SiN platform allowing low loss in the C-band with a low-temperature deposition.