The phase-change-material-based dynamic metalens with ITO heater

In this study, we explore the innovative potential of metalenses as a compact and flexible alternative to digital micromirror devices, marking a significant advancement in optical engineering. Specifically, we highlight the use of the phase change material Sb₂Se₃ for its ability to enable swift, reversible, and non-volatile focusing and defocusing actions within the 1550 nm telecom spectrum. The integration of a robust ITO microheater into the lens design enhances its functionality, paving the way for dynamic meta lenses suited for beamforming applications. Through a detailed microfabrication process, we demonstrate a metalens capable of rapid tuning at the 0.1MHz level for focusing and defocusing within the C band communication range, by toggling the phase change material between its amorphous and crystalline states. Experimental results reveal a high contrast ratio for switching of 28.7 dB, underscoring the device's efficiency and potential in revolutionizing optical component design for telecommunications and beyond.