Wafer level nano-optics solution for AR glasses

In this industry talk, we will provide a comprehensive overview of AR waveguide manufacturing processes, focusing on the critical phases in wafer-level nano-optics production. The discussion will navigate through both the Front End of Line (FEOL) and Back End of Line (BEOL) processes, covering essential steps like master fabrication, nanoimprinting lithography, laser dicing, edge blackening, and stacking. Key techniques such as Electron Beam Lithography (EBL) and Nanoimprint Lithography (NIL) will be explored, emphasizing their crucial roles in nano-optics manufacturing. The presentation will use AR waveguides as case studies to illustrate these processes, with a specific emphasis on the significance of NIL.