Imaging mmWave propagation on wafer

We demonstrate an electro-optic imaging system for measuring millimeter-wave propagation along a coplanar waveguide (CPW). A polarization-resolved microscope images small electro-optic effects due to millimeter-wave voltages between the signal and ground of the CPW. Dual electro-optic frequency combs demonstrate time-domain waveform imaging on-wafer with >100 GHz of bandwidth. A second configuration demonstrates continuous wave optically-derived vector network analysis with measurement planes on-wafer, filling the role of multiple electronic network analyzers but with instantaneous bandwidth and time-domain capability that cannot be achieved otherwise.