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In this work we try to optimize an IR-MEMS-emitter as a source for fast NDIR (Non-dispersive infrared) measurements. NDIR sensors are state of the art for measuring gas concentrations in the Mid-infrared spectrum. However, current IR-light sources such as micro light bulbs and MIR-LEDs cannot satisfy all the requirements for modern NDIR sensors. Therefore MEMS-IR-emitters are the only suitable source. Time dependent measurements require a pulsed sensor operation. Industrial users expect measurement frequencies of 20 Hz to 100 Hz. Current commercially available MEMS-IR-emitters already reach their usability limit at 10 to 20 Hz. The aim of our studies is to optimize an IR-MEMS-emitter and its operating mode for high signal modulation at pulse rates about 100 Hz. After initial tests with hybrid assembled arrays of different internally manufactured emitters, more complex emitter geometrics are simulated with Comsol Multiphysics within the range of our manufacturing possibilities.
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Schildhauer et al. (2024) studied this question.
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