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We demonstrate a novel optical phased array (OPA) technology of all-solid state LiDAR module in autonomous vehicles. The OPA chip is designed a reflective structure with electro-optical modulation phase array. A key feature of this design is to apply the reflective multi-dielectric layer and bipolar NPN electronic control structure in each nano-resonator. The result enables to exhibit wide FOV of 30° × 30° and high-resolution of 0.2° × 0.2° at estimation rate of 1GHz to adjust independently the amplitude. The newly developed OPA chip is beneficial for using in 3D sensing, optical communication, and biomedical imaging.
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Chang et al. (2024) studied this question.
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