The measurement method based on the principle of optical coherence meets many requirements for high-precision nondestructive testing in advanced integrated circuit manufacturing processes. Effectively interpreting the acquired fringe information in optical coherence measurements is an essential prerequisite for achieving precision assurance. Due to issues like spectrum aliasing, traditional structured light reconstruction techniques are limited to sub-micron pixel-level accuracy in terms of precision. This paper uses time-frequency analysis to analyze the peak envelope signal formed by white light interference. Through the measurement application and simulation of typical structures represented by stepped gratings and deep trenches in semiconductor processes, the application prospects and directions of white light scanning interferometry are discussed.
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Zhang et al. (2024) studied this question.
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