In order to verify the applicability of the white light interferometer in the field of micro-nano size measurement. This paper analyzes the application of the white light interferometer in the field of micro-nano size measurement by using four cases, namely, the worn glasses lens, the ruby microsphere, the resolution plate and the solder joint. The measurement results show that the white light interferometer is not only suitable for the traditional roughness and step measurement, but also has a wide range of applications in the measurement and evaluation of micro-scratches, microsphere radius, micro-irregular size area and so on.
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Hu et al. (2024) studied this question.
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