We present a MEMS piezoresistive pressure sensor to place in catheters for neonatal applications, catheter size from 1 to 2 French units, i.e., sensor with the dimensions 'Length*Width*Thickness' of 500 μ m × 150 μ m × 150 μ m. We designed, fabricated, and characterized this sensor, which can operate reliably in the pressure range of 0 to 300mmHg and has a sensitivity of 8 μ V / V / mmHg with a nonlinearity less than 1% of Full-Scale output.
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