Experimental evaluation demonstrates high isolation and a capacitive ratio of 300 in Ka-band molybdenum RF MEMS switches, highlighting robust high-frequency performance.
This paper presents the design and fabrication of a high-performance molybdenum-based capacitive Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) shunt switch. Molybdenum offers high robustness against stress and temperature compared to gold. The measured results show that switches provide return loss better than 15.05dB, insertion loss less than 1.42 dB (Off state), and isolation better than 17.69dB during (On state) in Ka-band. The capacitive ratio achieved is 300, with a maximum pull-in voltage of 7.6V.
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Narang et al. (2024) studied this question.
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