Applications of Power Supply for RF Discharge in Low-temperature Plasma Sterilization

The purpose of this study is to design and implement a high-frequency plasma power supply for endoscopy sterilization. The advantage of low-temperature plasma is its short sterilization cycle, which is suitable for devices that are not heat and moisture resistant. After excitation, it does not produce any toxic by-products, only water and oxygen. This is a series of sterilization methods that are in line with sustainable green living. In this study, a class-D series-parallel resonant converter is developed as a high-frequency RF plasma power supply. An enhanced gallium nitride (E-mode HMET GaN) power switch was selected to achieve excitation conditions at 13.56 MHz which verifies the system experiment.