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February 23, 2024

High throughput CD-SEM metrology using image denoising based on deep learning

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Authors

TOTomoyuki OkudaTYToshinori YamauchiSKSan Kang

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Cite This Study

Okuda et al. (2024) studied this question.

synapsesocial.com/papers/68e77e09b6db6435876f24b8https://doi.org/10.1117/12.3006709
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  5. 5Classification of FESEM Images of Nanostructures by Noval Deep Learning Algorithm2024