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The emerging two-photon polymerization (TPP) technique enables high-resolution printing of complex 3D structures, revolutionizing micro/nano additive manufacturing. Various fast scanning and parallel processing strategies have been proposed to promote its efficiency. However, obtaining large numbers of uniform focal spots for parallel high-speed scanning remains challenging, which hampers the realization of higher throughput. We report a TPP printing platform that combines galvanometric mirrors and liquid crystal on silicon spatial light modulator (LCoS-SLM). By setting the target light field at LCoS-SLM's diffraction center, sufficient energy is acquired to support simultaneous polymerization of over 400 foci. With fast scanning, the maximum printing speed achieves 1.49 × 108 voxels s–1, surpassing the existing scanning-based TPP methods while maintaining high printing resolution and flexibility. To demonstrate the processing capability, functional 3D microstructure arrays are rapidly fabricated and applied in micro-optics and micro-object manipulation. Our method may expand the prospects of TPP in large-scale micro/nanomanufacturing.
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Leran Zhang
Beihang University
Chaowei Wang
Beijing University of Posts and Telecommunications
Chenchu Zhang
Hefei University of Technology
Nano Letters
University of Science and Technology of China
Hefei University of Technology
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Zhang et al. (Tue,) studied this question.
synapsesocial.com/papers/68e785a8b6db6435876f8482 — DOI: https://doi.org/10.1021/acs.nanolett.4c00505