Micro-Transfer-Printed InP-Based Membrane Photonic Devices on Thin-Film Lithium Niobate Platform

We demonstrate a heterogeneous integration of electrically-pumped membrane lasers and semiconductor optical amplifiers (SOAs) on a thin-film lithium niobate (TFLN) platform by a micro-transfer-printing (μTP) method. Thanks to the low coupling loss (∼1.0 dB) between the InP-based membrane photonic devices and the TFLN waveguides, mW-class output power laser and low-power-consumption SOA on a TFLN platform are achieved. A 128-Gbit/s non-return-to-zero (NRZ) signal modulation is also demonstrated with a TFLN Mach-Zehnder modulator and an integrated membrane laser. These results indicate that the heterogeneous integration of membrane devices using μTP is promising for manufacturing TFLN photonic integrated circuits for optical communications and other applications.