Large-Scale Carbon Nanowall Synthesis Using Upgraded ReSLAN Plasma Source

We synthesized carbon nanowall (CNW) films on a copper substrate using an upgraded ReSLAN plasma source. The morphology and structural characteristics of CNWs synthesized according to the position of the copper substrate ( XY plane and ZX plane) were analyzed using FE-SEM and Raman spectroscopy. When synthesized in the ZX plane, it was possible to achieve a surface area synthesis of 450 mm, but the uniformity of the CNWs film synthesized between the slits and magnets was low. The CNW film synthesized in the XY plane had a smaller area, approximately 60 <tex-math notation="LaTeX">×</tex-math> 240 mm, compared to the ZX plane synthesis, but it exhibited a very good uniformity with a graphitization uniformity of 5.8%. We propose a roll-to-roll process system for continuous CNWs synthesis to be conducted in the future.