High magnification optical imaging systems for the characterization of soft X-ray focii

We present a series of novel X-ray imaging systems designed specifically for the soft X-ray energy range, optimized for operation in ultra-high-vacuum environments and compactness. These systems achieve micrometre-level spatial resolution with high collection efficiency of visible light by using high numerical aperture optics. Comprehensive characterization of the systems' response was performed, including linearity assessments and X-ray sensitivity measurements, across X-ray photon densities ranging from 1 nJ m −2 to 10 −4 nJ m −2 . The imaging system was employed for caustic measurements to characterize the X-ray focal spot and to demonstrate its capabilities. Finally, grating interferometry was used to measure the wavefront distortion, yielding a pitch resolution as fine as 3.1 µm. These results underscore the system's potential for high-resolution soft X-ray imaging and wavefront characterization applications.