Structural and morphological features of single-component and composite polyethylene-based coatings deposited from active gas phase

Atomic force microscopy and infrared spectroscopy were used to investigate the morphology and molecular structure of nanoscale coatings deposited from volatile products of electron-beam dispersion (EBD) of polyethylene (PE) and its mixture with aluminum chloride, both with and without laser assistance. The coatings were deposited onto silicon substrates modified to vary surface energy. It was found that in the case of single-component PE targets, decreasing surface energy leads to a monotonic reduction in surface roughness and average grain size, as well as an increase in the fractal dimension of structural formations. Coatings obtained from the dispersion products of PE + AlCl 3 mixtures exhibit significantly lower roughness and smaller grain volumes compared to those formed from single-component targets. However, their structural and morphological parameters do not correlate with the substrate’s surface energy. Laser stimulation during electron-beam dispersion has a minor effect on the molecular structure of the coatings. Using of these layers due to their antifriction and hydrophobic properties is promising in microelectronics and microfluidics devices.