Multi-Layer Workpieces and Multiple-Wire Electrochemical Micromachining with Horizontal Electrolyte Flushing

The multi-layer workpiece and multi-wire electrochemical microfabrication method (MWECM) has considerable potential in improving production efficiency and is considered a promising technology for manufacturing high-quality array microstructures. However, due to the accumulation of electrolytic by-products between workpiece layers, the machining accuracy is relatively low, which still limits its application in industrial environments. To address this issue, this article introduces a method to enhance mass transfer, which involves multi-layer workpieces and multi-wire electrochemical microfabrication, and employs horizontal electrolyte flushing (MWECMF). This innovation promotes the effective discharge of electrolytic deposits, thereby enhancing the renewal of electrolytes within the electrode gap. And use flow field simulation to optimize the interlayer spacing of workpieces and determine the optimal workpiece spacing. In addition, single factor experiments were conducted to determine the optimal processing parameters, including wire feed speed, power supply voltage, frequency, and duty cycle. Finally, at a feed rate of 1.2 µm/s, an array microstructure was successfully fabricated using a two-wire electrode setup and a four-layer workpiece configuration, achieving an overall machining rate of 9.6 µm/s. Compared to traditional tools or workpiece vibration mass transfer, the MWECMF method significantly improves the machining efficiency of wire electrochemical microfabrication (WECM).