Direct Fabrication of Inclined-Sidewall Microgrooves with Shaped Flat-Top Beams

Microgrooves have demonstrated significant application value across various fields. As a key processing technology, femtosecond laser processing exhibits notable advantages due to its high precision and minimal thermal impact. This study presents a method for fabricating microgrooves with inclined sidewalls using shaped flat-top laser beams. By controlling both the beam shape and scanning parameters, microgrooves with tailored sidewall morphology are produced in a single scan on silicon wafers. The optical performance of the fabricated structures is further evaluated through blazed grating prototypes. The experimental results aligned well with theoretical predictions. These results confirm that the proposed approach provides a viable technical pathway for efficient and high-quality fabrication of functional microstructures on comparable materials.