Analysis demonstrates the suppression of transverse modes in TC-SAW resonators using bent metal strips, highlighting geometric parameters' importance.
This article investigates the use of bent metal strips on the top of a SiO2 layer for the suppression of spurious modes in temperature-compensated surface acoustic wave (TC-SAW) resonators employing a SiO2/Cu/128°YX-LiNbO3 structure. The proposed metal strip method includes two parts: a primary metal strip located at the edge of the interdigital transducer (IDT) aperture region and a secondary metal strip in the gap region. The impact of the geometric parameters of bent metal strips was calculated by the 3D finite element method (FEM), and theoretical simulation results show that this method can effectively suppress the transverse modes and mitigate the gap modes originating from the gap region in conventional TC-SAW resonators. Furthermore, experimental validation further confirms that the proposed method can effectively suppress nearly all spurious modes without degrading the performance of the quality factor.
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Li et al. (2025) studied this question.
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