High Resolution Detector for X-Ray Visualization

A compact two-dimensional high-resolution detector for X-ray imaging has been developed. The main elements of the detector are a 20-µm-thick LuAG:Ce scintillation crystal and a monochrome CMOS sensor with a resolution of 20 MP and a shooting rate of up to 20 frame/s. The detector efficiency has been estimated on an Excillium MetalJet D2 laboratory source with a GaIn liquid anode. The objects of study were a copper mesh with a 25.4 µm period and a test structure made of tantalum, 500 nm thick, with a radially decreasing pattern (Siemens star). Additionally, radiography of a biological object (centipede) was carried out. The spatial resolution of the detector was less than 3 µm.