Optical Properties at 1550 nm of Ion-Beam Sputtered Silicon Nitride Thin Films

Coating Brownian thermal noise is a major limitation to the sensitivity of gravitational-wave detectors. To reduce it, future detectors are planned to operate at cryogenic temperatures. This implies a change of their mirror coating materials and the use of a longer laser wavelength, such as 1550 nm. A stack of amorphous silicon and silicon nitride layers has previously been proposed as a promising combination of low- and high-refractive index materials to realize low-noise highly-reflective coatings. An essential step towards such coatings is the production of both materials via ion-beam sputtering. In this paper, for the first time, we present a study of the optical properties at 1550 nm of silicon nitride thin films deposited via ion beam sputtering. The refractive index and optical absorption as a function of post-deposition heat treatment temperature are investigated using a spectrophotometer and a photo-thermal common-path interferometer. Finally, we discuss the prospect of combining this material with amorphous silicon.