Classification, performance and recycling of ceria-based materials used for chemical mechanical polishing

Key Points

• The research aims to classify ceria-based polishing materials and assess their performance and recycling potential.
• Characterization of ceria-based materials
• Evaluation of mechanical hardness
• Analysis of chemical reactivity
• Performance testing in chemical mechanical polishing applications
• Ceria-based materials demonstrated balanced chemical reactivity and moderate mechanical hardness.
• Materials performed effectively in ultra-precision surface processing.
• Findings suggest potential for recycling these polishing materials.