High-sensitivity SAW micro-pressure sensor with cantilever beam structure: optimization of IDT and electrode

Key Points

• The optimized pressure sensor achieved a significant enhancement in sensitivity and response time, improving overall detection capabilities.
• Sensitivity was increased by over 30% compared to previous designs, allowing for more accurate measurements at micro-scale levels.
• Optimization of interdigital transducers (IDT) was conducted using simulations and practical tests to enhance its performance characteristics.
• Findings underscore the necessity for further refinement in design to improve practical applications in advanced sensing technologies.