Plasmonic nanogratings with structural color and diffraction capabilities are essential components of metasurface-based optical systems. However, current methods for fabricating high-fidelity nanograting pixels remain limited in scalability, material compatibility, and adaptability to curved or flexible surfaces. Herein, we present an interfacial self-assembly assisted nanoparticle imprinting (ISA-NPI) strategy for the template-defined fabrication of submicron plasmonic gratings with high structural fidelity and broad substrate compatibility. This method combines self-assembled nanoparticle films with template-guided pattern transfer, enabling precise control over grating geometry, layer number, and interparticle spacing. Large-area characterization confirms millimeter-scale continuity and defect-free nanograting lines, validating the scalability and pattern fidelity of the ISA-NPI process. Integrated into metal-insulator-metal resonator stacks, the nanograting arrays exhibit tunable Fabry-Pérot resonances and angle-selective diffraction with first-order efficiencies up to 60%. This method combines self-assembled nanoparticle films with mold-guided pattern transfer, enabling precise control over grating geometry, layer number, and interparticle spacing.
Zhang et al. (Thu,) studied this question.
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