Synthesis, Structures, and Thermal Properties of Volatile Li/Co Complexes for the Chemical Vapor Deposition of Mixed Oxide Films

New volatile heterometallic complexes [Co(acacen)Li(tmhd)] and Li2CoL4 (acacen = N,N′-ethylenebis(acetylacetoiminate); tmhd = 2,2,6,6-tetramethylheptane-3,5-dionate (dipivaloylmethanate); L = 2,2-dimethyl-6-methoxy-6-methylheptane-3,5-dionate) are synthesized and characterized. The crystal structures of [Co(acacen)Li(tmhd)] and [CoL2]2 as the initial monometallic compound for Li2CoL4 are determined and discussed. The thermal properties of the compounds are investigated by vacuum sublimation and TGA, and the compounds themselves are studied from the standpoint of their suitability as precursors for metal-organic chemical vapor deposition (MOCVD). Based on the results of the study, [Co(acacen)Li(tmhd)] is recommended as a mixed-metal precursor for CVD of Li-Co-O oxide films.