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June 6, 2026Inorganic Chemistry

Volatile Heteroleptic Molybdenum Complexes: Synthesis, Structure, and Thermal Properties

Sung Kwang Lee Ji Yeon Ryu Bo Keun Park Seung Uk Son Taek-Mo Chung

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Key Points

The aim is to synthesize and characterize volatile heteroleptic molybdenum complexes for use in vapor-phase deposition.
Synthesized molybdenum complexes through chemical reactions.
Characterized the complexes for their structural and thermal properties.
Assessed their suitability as deposition precursors for thin films.
The synthesized complexes exhibited significant volatility and stability for deposition applications.
Thermal properties were favorable for vapor-phase deposition, supporting their use in thin films.

Implication

Evaluates thermal properties of molybdenum complexes as deposition precursors for thin films, indicating their potential use.

Abstract

is a potential candidate to apply as vapor-phase deposition precursor for molybdenum-containing thin films.

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Cite This Study

Lee et al. (2026) studied this question.

synapsesocial.com/papers/6a265c42ad53cfb9357c58d0 https://doi.org/10.1021/acs.inorgchem.6c01406

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Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

1Molybdenum‐carbothioamide complexes as potential single‐source precursors for MoS 2 thin filmOriginal Research · 2026
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4Cover Feature: Targeting Manganese Amidinate and ß‐Ketoiminate Complexes as Precursors for Mn‐Based Thin Film Deposition (Chem. Eur. J. 45/2024)2024
5Oxidant-driven growth and crystallization of MoOx in H2-gas-free thermal atomic layer deposition using a high-volatility liquid Mo precursorOriginal Research · 2026

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