Tutorial evaluates acoustic microscopy for defect localization, suggesting improved techniques and AI applications.
ND-Techniques highly valuable for Defect localization ■ ND-at expense of resolution and sensitivity → imaging through intermediate materials ■ Increasingly challenged with integration density ■ Tutorial aimed at proving an insight into SAM ■ Existing methods need to be adjusted to novel technologies ■ AI-signal and Data interpretation ■ Resolution & Sensitivity enhancement through analytical approaches.
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Sebastian Brand (2024) studied this question.
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