Development of a Method for Investigating Temperature Dependences of Apparent Acceleration in MEMS Accelerometer Operation and Application

This work addresses the lack of standardized verification methods for MEMS accelerometers in inertial systems. The study develops and tests three novel methodologies using the automated “Daktilos” verification system to investigate functional characteristics and temperature dependences of apparent acceleration. The methods include an accelerated procedure for quick checks, a precise method with fixed positions to minimize motion-induced noise, and a comprehensive procedure for full-axis testing. Experimental results on analog and digital accelerometers confirm the methods’ effectiveness, revealing significant temperature-dependent zero-g bias drift. The obtained data provide a basis for precise parameter extraction, enabling improved quality control and calibration for modern inertial navigation systems.