Study on Vibration Isolation System for Precision Equipment

In precision instruments that perform mass measurements within a transport system, vibrations from the system can lead to a degradation of measurement accuracy or even measurement failure. However, for multi-degree-of-freedom, multi-input systems, optimal design is required rather than merely installing a vibration isolation unit. This study examines the maintenance of system functionality for precision measurement instruments in transport systems through a vibration isolation system. An analytical model is developed to evaluate the vibration reduction effect of the isolation unit, considering a precision instrument and the floor on which it is installed, which is subjected to micro-vibrations from the transport system. Based on the results of a time history response analysis, the paper demonstrates the changes in response due to the influence of a Tuned Mass Damper and variations in mass.