In this study, the effects of ambient condition and load and sliding speed on the micro-friction characteristics of DLC films were investigated. DLC(Diamond-Like Carbon) films were deposited on flat Si plates or on Si plates with micro-patterns. In the micro-load test, compared to the high load test, it was found that smaller friction coefficients were obtained in vacuum and that friction or wear marks were not observed. In the load change test, it was found that the friction coefficient decreased as the load decreased. In the speed change test, it was found that the friction coefficient decreases as the sliding speed decreases, and that the friction coefficient increases with the micro-pattern.
Oka et al. (Wed,) studied this question.