Component Analysis and Classification of Aerosol Using Tof-Sims

Very small particles called aerosol are suspended in air. In general, bulk analysis is performed on lumped aerosols with various sources after the filter collection. The average composition of the collected particles can be obtained, but it cannot be obtained for each particles. On the other hand, surface analysis techniques such as TOF-SIMS has opposite performance. In this study, we proposed a method to perform the lumped aerosol analysis included the individual particle information from SEM images. However, in this method the accuracy of individual information is not sufficient compared with TOF-SIMS. In this study, shape cluster analysis using SEM images was compared with component cluster analysis using TOF-SIMS. In order to confirm the correlation between the shape and the components, the particles which were recognized as the same types were selected, and both cluster analyses were performed using a total of 298 particles. Therefore, we found particles that cannot be separated by the current method using shape clusters, and proposed a solution. With this method, if there is a correlation between the shape and type from detailed investigation by TOF-SIMS, it can be used as a novel monitoring technique.