Computer Modeling of the Transient RF Discharge in Nitrogen : A Continuum Model with the Energy Equation

A continuum model is used for simulating the development of the transient RF discharge between parallel plates in nitrogen under a plasma processing condition. Non-equilibrium characteristics of the electron swarm are taken into account using ionization and excitation coefficients obtained by solving the electron energy equation simultaneously with the continuity equation for electrons. Significant characteristics of the transient RF discharge such as the temporal variations of the gap voltage, the discharge power and the discharge current are calcluated by numerically solving the continuity equations for electrons and ions using the F. C. T. SHASTA algorithm together with Poisson's equation and a RF circuit equation. The spatio-temporal evolutions of the electron and ion densities, the photon emission of the 2nd positive band and the space charge field are also calculated. The validity of the present model is discussed by comparing these calculated data with experimental observations and with data obtained by a Monte Carlo technique.