This review highlights sensing strategies for airborne molecular contaminants in semiconductor manufacturing, implying improved product yield and quality.
Key Points
The review aims to examine the impact of airborne molecular contaminants on semiconductor manufacturing and evaluate innovative sensing solutions.
Reviewed the impact of airborne molecular contaminants on device performance
Summarized sensing strategies for different contaminant groups
Discussed advancements in chemoresistive gas sensors and their applications
Identified high sensitivity and cost-effectiveness of chemoresistive sensors
Highlighted various sensing strategies for acidic, basic, and VOC contaminants
Outlined technical challenges and potential solutions for real-time monitoring