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January 1, 1968Journal of The Electrochemical Society

Influence of Substrate Temperature on GaAs Epitaxial Deposition Rates

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DSDon W. ShawGeneral Electric (United States)

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Don W. Shaw (1968) studied this question.

synapsesocial.com/papers/69d7349fc74376700bf309f4https://doi.org/10.1149/1.2411231
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