Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing

3 MoO 2 Thin films a b s t r a c t Molybdenum forms a range of oxides with different stoichiometries and crystal structures, which lead to different properties and performance in diverse applications. Herein, crystalline molybdenum oxide thin films with controlled phase composition are deposited by atomic layer deposition. The MoO 2 (thd) 2 and O 3 as precursors enable well-controlled growth of uniform and conformal films at 200e275 C. The asdeposited films are rough and, in most cases, consist of a mixture of aand b-MoO 3 as well as an unidentified suboxide MoO x (2.75