What question did this study set out to answer?

To establish and parameterize an electron energy-loss spectroscopy log-ratio method for accurately measuring local specimen thickness in transmission electron microscopy.

February 1, 1988Journal of Electron Microscopy Technique

EELS log‐ratio technique for specimen‐thickness measurement in the TEM

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Authors

TMT. MalisNatural Resources Canada SCShangcong ChengLawrence Berkeley National Laboratory RER.F. EgertonUniversity of Alberta

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Implication

Experimental study reveals an inelastic mean free path parameterization in eleven inorganic elements, suggesting specimen thickness can be measured within twenty percent accuracy.

Key Points

To establish and parameterize an electron energy-loss spectroscopy log-ratio method for accurately measuring local specimen thickness in transmission electron microscopy.
Measured the total inelastic mean free path across 11 materials covering a range of atomic numbers.
Applied the log-ratio formula relating local thickness to the ratio of total spectral area to zero-loss area.
Parameterized the mean free path as a function of incident beam energy, collection semiangle, and atomic number.
Parameterized the inelastic mean free path as lambda = 106F (E0/Em) / ln(2 beta E0/Em), where Em = 7.6 Z^0.36 and F accounts for relativistic beam energy corrections.
Demonstrated that the resulting formulation enables absolute thickness determination with an estimated accuracy of +/- 20% in most inorganic specimens.

Cite This Study

Malis et al. (1988) studied this question.

synapsesocial.com/papers/69dabdaa0f32475823a3da98 https://doi.org/10.1002/jemt.1060080206

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Implication

Experimental study reveals an inelastic mean free path parameterization in eleven inorganic elements, suggesting specimen thickness can be measured within twenty percent accuracy.

EELS log‐ratio technique for specimen‐thickness measurement in the TEM

Discussion

Member takes

Implication

Key Points

Cite This Study

EELS log‐ratio technique for specimen‐thickness measurement in the TEM

Discussion

Member takes

Implication

Key Points

Cite This Study

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