What question did this study set out to answer?

Establish empirical atomic sensitivity factors from experimental intensity ratios relative to fluorine 1s to support accurate quantitative electron spectroscopy for chemical analysis.

October 1, 1981Surface and Interface Analysis

Empirical atomic sensitivity factors for quantitative analysis by electron spectroscopy for chemical analysis

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Authors

CWC. D. WagnerNorthumbria University LDLawrence E. DavisMotorola (United States)MZM. ZellerUniversity of Notre Dame

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Implication

Experimental study uncovers empirical atomic sensitivity factors across 135 chemical compounds, indicating that theoretical cross-section models carry errors up to 40%.

Key Points

Establish empirical atomic sensitivity factors from experimental intensity ratios relative to fluorine 1s to support accurate quantitative electron spectroscopy for chemical analysis.
Measured intensity ratios of spectral lines across 135 compounds containing 62 elements, using F1s as a primary standard and K2p3/2 as a secondary standard.
Collected spectroscopic data using two instruments (Physical Electronics 550 and Varian IEE-15) operating with electron retardation at constant pass energy.
Calculated best-fit log-log curves of experimental intensity ratios against binding energy guided by theoretical cross-section line segments.
Derived empirical sensitivity factors for primary (1s, 2p3/2, 3d5/2, 4f7/2) and secondary lines, showing good agreement between both spectrometer instruments.
Found lower and variable sensitivity factors in rare earth elements and first-series transition metals due to chemical-state-dependent multi-electron processes.
Demonstrated that widely used theoretical cross-section data deviate significantly from experimental values, showing errors up to 40% for strong lines and even greater errors for secondary lines.

Cite This Study

Wagner et al. (1981) studied this question.

synapsesocial.com/papers/69dac7470d8d6ef495a3c1ff https://doi.org/10.1002/sia.740030506

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Implication

Experimental study uncovers empirical atomic sensitivity factors across 135 chemical compounds, indicating that theoretical cross-section models carry errors up to 40%.

Empirical atomic sensitivity factors for quantitative analysis by electron spectroscopy for chemical analysis

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Implication

Key Points

Cite This Study

Empirical atomic sensitivity factors for quantitative analysis by electron spectroscopy for chemical analysis

Discussion

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Implication

Key Points

Cite This Study

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