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April 14, 2000Science

Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

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MRMikko RitalaUniversity of HelsinkiKKKaupo KukliUniversity of TartuARAntti RahtuUniversity of Helsinki

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Ritala et al. (2000) studied this question.

synapsesocial.com/papers/69daca55aae38ff6ad836acbhttps://doi.org/10.1126/science.288.5464.319
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